Mechanical Properties of Amorphous Hard Carbon Films Prepared by Cathodic ARC Deposition
نویسندگان
چکیده
منابع مشابه
Properties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum arc technique
The properties of nitrogen doped tetrahedral amorphous carbon films prepared by the filtered cathodic vacuum arc technique have been studied. The doping species, nitrogen ions, were produced by an ion beam source. The nitrogen flow rate was varied from 0.5 to 10 sccm while keeping other deposition conditions constant. The nitrogen content in deposited films was determined by Rutherford backscat...
متن کاملStructure and mechanical properties of low stress tetrahedral amorphous carbon films prepared by pulsed laser deposition
Tetrahedral amorphous carbon films have been produced by pulsed laser deposition, at a wavelength of 248 nm, ablating highly oriented pyrolytic graphite at room temperature, in a 10−2 Pa vacuum, at fluences ranging between 0.5 and 35 Jcm−2. Both (100) Si wafers and wafers covered with a SiC polycrystalline interlayer were used as substrates. Film structure was investigated by Raman spectroscopy...
متن کاملThe effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc
The mechanical properties of both undoped and nitrogen containing tetrahedral amorphous carbon (ta-C and ta-C:N ) films, such as hardness and E-modulus, are investigated. The mechanical properties are related to the film structures. The ta-C and ta-C:N films are prepared in a filtered cathodic vacuum arc process. Nanoindentation testing is used to measure the mechanical properties of these film...
متن کاملNitrogenated tetrahedral amorphous carbon films prepared by ion-beam-assisted filtered cathodic vacuum arc technique for solar cells application
Fabrication and characterization of nitrogenated tetrahedral amorphous carbon (ta-C:N) semiconductor/crystalline p-type silicon (p-Si) heterojunction structures are reported. The electron-hole pairs generated from both ta-C:N and Si depletion regions were observed from photoresponse measurements. The peaks are centered at about 540 and 1020 nm, which correspond to the optical absorption edge of...
متن کاملDeposition of permalloy films by filtered cathodic vacuum arc
The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1995
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-383-453